Title:
SYSTEMS AND METHODS FOR MASTERING MICROSTRUCTURES THROUGH A SUBSTRATE USING NEGATIVE PHOTORESIST AND MICROSTRUCTURE MASTERS SO PRODUCED
Document Type and Number:
WIPO Patent Application WO2005035435
Kind Code:
A3
Abstract:
Microstructures (132) are fabricated by impinging a radiation beam (120), such as a laser beam, through a substrate that is transparent to the laser beam, into a negative photoresist layer (110) on the substrate. The negative photoresist layer may be subsequently developed to provide a master for optical and/or mechanical microstructures. Related systems, microstructure products and microstructure masters also are disclosed.
Inventors:
FREESE ROBERT P (US)
RINEHART THOMAS A (US)
WOOD ROBERT L (US)
RINEHART THOMAS A (US)
WOOD ROBERT L (US)
Application Number:
PCT/US2004/027209
Publication Date:
June 09, 2005
Filing Date:
August 20, 2004
Export Citation:
Assignee:
BRIGHT VIEW TECHNOLOGIES INC (US)
FREESE ROBERT P (US)
RINEHART THOMAS A (US)
WOOD ROBERT L (US)
FREESE ROBERT P (US)
RINEHART THOMAS A (US)
WOOD ROBERT L (US)
International Classes:
G02B3/00; G02B5/18; G03F7/00; G03F7/20; G03F7/24; (IPC1-7): G02B3/00; G03F7/00; G03H1/00; G11B7/00
Domestic Patent References:
| WO2002041309A1 | 2002-05-23 |
Foreign References:
| US6313956B1 | 2001-11-06 | |||
| US20010017830A1 | 2001-08-30 | |||
| US3945825A | 1976-03-23 | |||
| US4806442A | 1989-02-21 |
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