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Title:
TAIL GAS ABSORPTION DEVICE FOR PRODUCING ELECTRONIC GRADE TRIFLUOROMETHANE
Document Type and Number:
WIPO Patent Application WO/2023/206915
Kind Code:
A1
Abstract:
Disclosed in the present invention is a tail gas absorption device for producing electronic grade trifluoromethane. The tail gas absorption device comprises a base and a treatment tower fixedly mounted on the base, wherein the interior of the treatment tower is rotatably connected to a driving shaft; a diverting mechanism is fixedly mounted on the driving shaft; a top end of the interior of the treatment tower is fixedly connected to a mesh plate; the base, the diverting mechanism and the mesh plate sequentially form a treatment chamber, an atomization chamber and a cooling chamber from top to bottom inside the base; an alkaline solution is arranged inside the treatment chamber; an atomization mechanism is arranged inside the atomization chamber; and the cooling mechanism is arranged inside the cooling chamber. According to the present invention, a sufficient amount of an alkaline solution is injected into the treatment chamber, and after trifluoromethane gas enters the treatment chamber through a gas intake pipe, impurities containing water vapor and carbon dioxide gas in produced trifluoromethane react with the alkaline solution, such that carbon dioxide and water vapor in the trifluoromethane are absorbed, and preliminary impurity removal and purification effects are achieved on the trifluoromethane.

Inventors:
LI WEIGUO (CN)
LIU ZHIQIANG (CN)
HUA HUI (CN)
LIN BAIZHI (CN)
QIU LING (CN)
ZHENG NANHUI (CN)
QIU YIXIN (CN)
LAI YUHUI (CN)
Application Number:
PCT/CN2022/118467
Publication Date:
November 02, 2023
Filing Date:
September 13, 2022
Export Citation:
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Assignee:
FUJIAN DEL TECH CO LTD (CN)
International Classes:
B01D53/78; B01D53/62; C07C17/38; C07C19/08
Foreign References:
CN114768511A2022-07-22
CN211886758U2020-11-10
CN103755543A2014-04-30
CN101168685A2008-04-30
CN113816827A2021-12-21
JP2002363115A2002-12-18
Attorney, Agent or Firm:
BEIJING HENGTAI MINGRUI INTELLECTUAL PROPERTY ACT FOR LIMITED COMPANY (CN)
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