Title:
TANK FOR LIQUID CHEMICAL SUBSTANCE
Document Type and Number:
WIPO Patent Application WO/2016/152342
Kind Code:
A1
Abstract:
Provided is a tank (2) that is for liquid chemical substances, that prevents contamination of a liquid chemical substance as soon as possible, and that can be suitably used as a tank for liquid chemical substances of high purity such as high purity trichlorosilane. The tank (2) includes a tank main body (4) and a connection unit (6) attached to the tank main body (4). The connection unit (6) includes: a chemical substance flow path (8) having an immersed section (8a) that is immersed in the chemical substance within the tank main body (4) and an extend-out section (8b) that extends out of the tank main body (4); and a gas flow path (10) that extends out from one end that is communicatively connected with the inside of the tank main body (4). The extend-out section (8b) of the chemical substance flow path (8) is disposed with a first on-off valve means (14) located downstream when viewed in a loading direction of the chemical substance into the tank main body (4), and a second on-off valve means (16) located upstream when viewed in the loading direction of the chemical substance. The gas flow path (10) is disposed with a third on-off valve means (20) located downstream when viewed in a flowing direction of gas to the tank main body (4), and a fourth on-off valve means (22) located upstream when viewed in the flowing direction of gas. The connection unit (6) further includes a link flow path (12) that links a site between the first on-off valve means (14) and the second on-off valve means (16) in the chemical substance flow path (8), to a site between the third on-off valve member (20) and the fourth on-off valve means (22) in the gas flow path (10). The link flow path (12) is disposed with a fifth on-off valve means (24).
Inventors:
YAMANE JUN (JP)
TOKUNAGA SHINJI (JP)
TOKUNAGA SHINJI (JP)
Application Number:
PCT/JP2016/054709
Publication Date:
September 29, 2016
Filing Date:
February 18, 2016
Export Citation:
Assignee:
TOKUYAMA CORP (JP)
International Classes:
B65D90/00; F17C13/04
Domestic Patent References:
| WO2013143745A1 | 2013-10-03 |
Foreign References:
| JP2001108199A | 2001-04-20 | |||
| JP2009094401A | 2009-04-30 | |||
| JPH06244120A | 1994-09-02 | |||
| JP2005131632A | 2005-05-26 | |||
| JPH09143740A | 1997-06-03 |
Attorney, Agent or Firm:
ONO, Hisazumi et al. (JP)
Ono Pure in addition (JP)
Ono Pure in addition (JP)
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