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Title:
TANTALUM CARBIDE-COATED CARBON MATERIAL AND MANUFACTURING METHOD FOR SAME
Document Type and Number:
WIPO Patent Application WO/2011/081210
Kind Code:
A1
Abstract:
A tantalum carbide coating film (42) which covers a carbon substrate (41) is formed on the surface of the carbon substrate (41). The tantalum carbide coating film (42) has a maximum peak value of at least 80° in the (311) plane orientation of a diffraction peak corresponding to the tantalum carbide as determined by X-ray diffraction.

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Inventors:
KONDO MIKA (JP)
Application Number:
PCT/JP2010/073810
Publication Date:
July 07, 2011
Filing Date:
December 28, 2010
Export Citation:
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Assignee:
TOYO TANSO CO (JP)
KONDO MIKA (JP)
International Classes:
C23C16/32; C30B29/36; H01L21/205
Domestic Patent References:
WO2006085635A12006-08-17
Foreign References:
JP2004084057A2004-03-18
JP3938361B22007-06-27
JP3779314B12006-05-24
JP2684106B21997-12-03
Other References:
See also references of EP 2520691A4
Attorney, Agent or Firm:
KAJI, Yoshiyuki et al. (JP)
梶 Yoshiyuki (JP)
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