Title:
TARGET HOLDER ASSEMBLY OF ION PROBE, AND SAMPLE TARGET PREPARATION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/128972
Kind Code:
A1
Abstract:
Disclosed are a target holder assembly of an ion probe, and a sample target preparation method. The target holder assembly comprises: a body (1) and sheets (2), wherein the middle part of the body (1) is provided with a sample target hole (11), and an opening portion of the sample target hole (11) away from a sample target intake side is symmetrically provided with limitation portions (12); and the sheets (2) and the limitation portions (12) match in terms of shape and size, and are used for forming, on a sample target, recesses for accommodating the limitation portions (12). According to the target holder assembly and the sample target preparation method, the limitation portions (12) are used for replacing a tungsten plate in the prior art to limit the sample target, and the limitation portions (12) abut against the recesses on the sample target, such that the surface, which is provided with a sample, of the sample target and the surface, which is provided with the limitation portions (12), of the body (1) are basically located in the same plane, thereby eliminating electric field distortion, which is caused by a height difference, close to an edge area, and reducing the problem of data reproducibility becoming poor due to the fact that an analysis point is too close to the boundary of the sample target.
Inventors:
LI JIAO (CN)
LI QIULI (CN)
LI QIULI (CN)
Application Number:
PCT/CN2020/115585
Publication Date:
July 01, 2021
Filing Date:
September 16, 2020
Export Citation:
Assignee:
INST OF GEOLOGY AND GEOPHYSICS CHINESE ACADEMY OF SCIENCES IGGCAS (CN)
International Classes:
G01N1/32; H01J49/04; G01N27/62; H01J37/20
Foreign References:
| CN111141811A | 2020-05-12 | |||
| CN106198709A | 2016-12-07 | |||
| CN207149526U | 2018-03-27 | |||
| CN108375497A | 2018-08-07 | |||
| CN108709927A | 2018-10-26 | |||
| CN106442699A | 2017-02-22 | |||
| US20080308727A1 | 2008-12-18 | |||
| JP2016033471A | 2016-03-10 | |||
| JP2014085211A | 2014-05-12 |
Other References:
LI JIAO, MA HONG-XIA;LIU YU;TANG GUO-QIANG;LING XIAO-XIAO;LI QIU-LI: "A Discussion on the Sample Preparation for SIMS Analysis", SYSTEMS ENGINEERING AND ELECTRONICS, vol. 37, no. 5, 1 September 2018 (2018-09-01), pages 852 - 858, XP055827332, ISSN: 1007-2802, DOI: 10.19658/j.issn.1007-2802.2018.37.109
Attorney, Agent or Firm:
BEIJING FORESTSONG PATENT AGENCY CO., LTD. (CN)
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