Title:
TARGET IMAGE-CAPTURE DEVICE AND EXTREME-ULTRAVIOLET-LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/239458
Kind Code:
A1
Abstract:
A target image-capture device according to an aspect of the present invention comprises: a delay circuit that receives a timing signal from outside and outputs a first trigger signal at a time delayed by a first delay time from the reception of the timing signal; an illumination light source that emits light on the basis of the first trigger signal; an image-capture unit with an optical amplifier, which is arranged so as to capture an image of the shadow of a target being observed by use of the emission of light from the illumination light source onto the target; a processing unit for performing image processing that includes a process for measuring a background luminance from the image captured by the image-capture unit; and a control unit that adjusts the gain of the optical amplifier on the basis of the background luminance.
Inventors:
HOSODA HIROKAZU (JP)
Application Number:
PCT/JP2018/022240
Publication Date:
December 19, 2019
Filing Date:
June 11, 2018
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H05G2/00
Domestic Patent References:
| WO2017126301A1 | 2017-07-27 | |||
| WO2015041260A1 | 2015-03-26 |
Foreign References:
| JPH02133884A | 1990-05-23 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
Download PDF: