Title:
TARGET MATERIAL IN-SITU MONITORING METHOD AND SYSTEM, AND COMPUTER DEVICE AND STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2023/240682
Kind Code:
A1
Abstract:
The present disclosure relates to a target material in-situ monitoring method and system, and a computer device and a storage medium. A correspondence between voltage and current parameters collected when a target material and a sputtering device are cooperatively used for the first time and the thickness of the target material is recorded, and a monitoring feedback mechanism is established. The target material in-situ monitoring method comprises: establishing a self-checking program in a sputtering device, wherein the self-checking program comprises a plurality of deposition stages, which are performed in sequence, and sputtering powers for the plurality of deposition stages are different from one another; and in the process of a target material and the sputtering device being used cooperatively, when the thickness of the target material needs to be measured, starting the sputtering device to execute the self-checking program, and after voltage and current parameters for the plurality of deposition stages are respectively acquired, determining the thickness of the target material on the basis of the voltage and current parameters for the plurality of deposition stages and a correspondence between the voltage and current parameters and the thickness of the target material.
Inventors:
ZHANG CHONG (CN)
Application Number:
PCT/CN2022/101870
Publication Date:
December 21, 2023
Filing Date:
June 28, 2022
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
C23C14/34
Foreign References:
| CN109470131A | 2019-03-15 | |||
| US20180265961A1 | 2018-09-20 | |||
| US20160013032A1 | 2016-01-14 |
Other References:
YANG, QIANG; GE, LIANG-QUAN; GU, YI; HUA, YONG-TAO; LUO, YAO-YAO: "Theoretical Calculation and Simulation Research on Micro X-Ray Tube Target Thickness and Spectra", SPECTROSCOPY AND SPECTRAL ANALYSIS, BEIJING DAXUE CHUBANSHE, CN, vol. 33, no. 4, 30 April 2013 (2013-04-30), CN , pages 1130 - 1134, XP009551607, ISSN: 1000-0593, DOI: 10.3964/j.issn.1000-0593(2013)04-1130-05
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
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