Title:
TARGET MEASURING DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/211551
Kind Code:
A1
Abstract:
This target measuring device is provided with: a photographing unit (80) that photographs an image of a target outputted from a target supply unit; a moving unit (82) that moves at least a part of the photographing unit; and a control unit (51) configured to perform first processing for updating coordinate system information of the image on the basis of a quantity the photographing unit moved by the moving unit, and second processing for measuring parameters of the target on the basis of the image photographed by the photographing unit, and the coordinate system information. Deviation of target measurement results due to the moving of the photographing unit can be corrected by updating the coordinate system information.
Inventors:
YABU TAKAYUKI (JP)
Application Number:
PCT/JP2017/018150
Publication Date:
November 22, 2018
Filing Date:
May 15, 2017
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G01B11/00; G03F7/20; H05G2/00
Domestic Patent References:
| WO2016147910A1 | 2016-09-22 | |||
| WO2017042881A1 | 2017-03-16 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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