Title:
TARGET SUPPLY DEVICE, EXTREME UV LIGHT GENERATOR, AND TARGET SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2018/203370
Kind Code:
A1
Abstract:
A target supply device according to one aspect of the present disclosure comprising a vibration element that applies vibration to a target substance outputted from a nozzle 80 so that droplets are formed, a droplet detection unit that detects the droplets, and a control unit 70. A first detection threshold value and a second detection threshold value, which are compared with a detection signal from the droplet detection unit, are set in the control unit 70. The first detection threshold value is used for generating a light emission trigger for a laser light. The second detection threshold value has a smaller absolute value, in relation to the base line of the detection signal, than the first detection threshold value. The control unit 70 calculates, on the basis of the detection signal and the second detection threshold value, an evaluation parameter relating to a satellite, and determines, on the basis of the evaluation parameter, the duty value of an electrical signal suited to the operation of the vibration element.
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Inventors:
TAKASHIMA YUTA (JP)
UENO YOSHIFUMI (JP)
UENO YOSHIFUMI (JP)
Application Number:
PCT/JP2017/017160
Publication Date:
November 08, 2018
Filing Date:
May 01, 2017
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H05G2/00
Domestic Patent References:
| WO2016013515A1 | 2016-01-28 | |||
| WO2016170972A1 | 2016-10-27 |
Foreign References:
| JP2014235805A | 2014-12-15 | |||
| JP2016515755A | 2016-05-30 | |||
| JP2013175434A | 2013-09-05 | |||
| JP2009106818A | 2009-05-21 | |||
| JP2009541093A | 2009-11-26 | |||
| JP2014019058A | 2014-02-03 | |||
| JP2006044000A | 2006-02-16 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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