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Title:
TEMPERATURE CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/095794
Kind Code:
A1
Abstract:
A temperature control device comprising: a top plate supporting a substrate; a base plate connected to the top plate so as to form an internal space therebetween; a thermoelectric module plate arranged in the internal space; a heat exchange plate arranged in the internal space and exchanging heat with the thermoelectric module plate; and a sealing member in contact with both the top plate and the base plate.

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Inventors:
KOBAYASHI ATSUSHI (JP)
HORIKOSHI MASATO (JP)
OHKUBO HIDEAKI (JP)
KIYOSAWA WATARU (JP)
Application Number:
PCT/JP2019/042611
Publication Date:
May 14, 2020
Filing Date:
October 30, 2019
Export Citation:
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Assignee:
KELK LTD (JP)
International Classes:
H01L35/30; H01L21/3065; H01L21/683; H01L35/32
Foreign References:
JP2015008287A2015-01-15
JP2017022216A2017-01-26
JP2002353298A2002-12-06
JP2009094138A2009-04-30
JP2016082077A2016-05-16
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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