Title:
TEMPERATURE MEASUREMENT METHOD, TEMPERATURE CALIBRATION METHOD AND TEMPERATURE MEASUREMENT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/185158
Kind Code:
A1
Abstract:
Provided is a temperature measurement method, comprising: placing a temperature calibration device of a first testing structure on a bearing table inside a chamber, wherein the first testing structure has a first function relationship between resistance and temperature; making the temperature of the chamber reach a set temperature; applying a voltage to two opposite ends of the first testing structure to obtain corresponding currents and resistance; and according to the resistance and the first function relationship, acquiring the actual temperature of the temperature calibration device. Further provided are a temperature calibration method and a temperature measurement apparatus, which are based on the temperature measurement method.
Inventors:
LIN SHIHCHIEH (CN)
Application Number:
PCT/CN2021/080352
Publication Date:
September 23, 2021
Filing Date:
March 12, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
G01K7/16
Domestic Patent References:
| WO2020033304A1 | 2020-02-13 |
Foreign References:
| CN109643668A | 2019-04-16 | |||
| CN109540961A | 2019-03-29 | |||
| CN110274705A | 2019-09-24 | |||
| CN106840439A | 2017-06-13 |
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
Download PDF: