Title:
TEMPERATURE MEASURING PROBE, TEMPERATURE MEASURING APPARATUS, AND TEMPERATURE MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/145305
Kind Code:
A1
Abstract:
A temperature measuring probe is characterized in that it has a film 4 on a part of a first surface of a cantilever 2 having an opening in the center, the film 4 is formed of a material different in coefficient of thermal expansion from the cantilever 2, it has a film 5 on a part of a surface of the cantilever 2 opposite to the first surface, the film 5 is formed of the same material as the film 4, and when the films 4 and 5 are projected onto a plane parallel to the cantilever 2, the projection image of the film 4 and the projection image of the film 5 do not coincide. Thus, a temperature measuring probe and a temperature measuring apparatus can be made that can be used with a general-purpose scanning probe microscope and is insusceptible to thermal deformation of a sample.
Inventors:
OJIMA KAORU (JP)
Application Number:
PCT/JP2011/002668
Publication Date:
November 24, 2011
Filing Date:
May 13, 2011
Export Citation:
Assignee:
CANON KK (JP)
OJIMA KAORU (JP)
OJIMA KAORU (JP)
International Classes:
G01K5/48; G01K5/64; G01K5/68; G01Q60/58
Foreign References:
| JPH08105801A | 1996-04-23 | |||
| JP2010115490A | 2010-05-27 |
Other References:
NAKABEPPU O ET AL: "SCANNING THERMAL IMAGING MICROSCOPY USING COMPOSITE CANTILEVER PROBES", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, vol. 66, no. 6, 6 February 1995 (1995-02-06), pages 694 - 696, XP000491181, ISSN: 0003-6951, DOI: 10.1063/1.114102
LAI J ET AL: "Optimization and performance of high-resolution micro-optomechanical thermal sensors", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 58, no. 2, 28 February 1997 (1997-02-28), pages 113 - 119, XP004122765, ISSN: 0924-4247, DOI: 10.1016/S0924-4247(96)01401-X
E GMELIN ET AL: "Sub-micrometer thermal physics - An overview on SThM techniques", THERMOCHIMICA ACTA 310, 1 January 1998 (1998-01-01), pages 1 - 17, XP055007313
JOHN L HAZEL ET AL: "Spring constants of composite ceramic/gold cantilevers for scanning probe microscopy", THIN SOLID FILMS 339, 1 January 1999 (1999-01-01), pages 249 - 257, XP055007391
LAI J ET AL: "Optimization and performance of high-resolution micro-optomechanical thermal sensors", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 58, no. 2, 28 February 1997 (1997-02-28), pages 113 - 119, XP004122765, ISSN: 0924-4247, DOI: 10.1016/S0924-4247(96)01401-X
E GMELIN ET AL: "Sub-micrometer thermal physics - An overview on SThM techniques", THERMOCHIMICA ACTA 310, 1 January 1998 (1998-01-01), pages 1 - 17, XP055007313
JOHN L HAZEL ET AL: "Spring constants of composite ceramic/gold cantilevers for scanning probe microscopy", THIN SOLID FILMS 339, 1 January 1999 (1999-01-01), pages 249 - 257, XP055007391
Attorney, Agent or Firm:
ABE, Takuma et al. (30-2 Shimomaruko 3-chome, Ohta-k, Tokyo 01, JP)
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Claims: