Title:
TEMPERATURE SENSOR FILM, CONDUCTIVE FILM, AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2020/162236
Kind Code:
A1
Abstract:
This conductive film 101 comprises: a silicon-based thin film as an underlayer 20 on one main surface of a resin film substrate 50; and a nickel thin film 10 thereon. The conductive film can be used to produce a temperature sensor film having a metal thin film which is patterned on the resin film substrate. The temperature sensor film is obtained by patterning the conductive nickel thin film to form a thermometric resistance part and a lead part connected to the thermometric resistance part.
Inventors:
SHIBUYA KATSUNORI (JP)
MIYAMOTO KODAI (JP)
YASUI SATOSHI (JP)
MIYAMOTO KODAI (JP)
YASUI SATOSHI (JP)
Application Number:
PCT/JP2020/002633
Publication Date:
August 13, 2020
Filing Date:
January 24, 2020
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
G01K7/18
Foreign References:
| JPH07333073A | 1995-12-22 | |||
| JP2003031402A | 2003-01-31 | |||
| JPH09510325A | 1997-10-14 |
Attorney, Agent or Firm:
SHINTAKU, Masato (JP)
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