Title:
TEMPERATURE SENSOR, AND MASS FLOW RATE METER AND MASS FLOW RATE CONTROL DEVICE THAT COMPRISE TEMPERATURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2022/059513
Kind Code:
A1
Abstract:
In the present invention, a temperature sensor used in a mass flow rate meter is configured from a flow path through which a fluid flows, a temperature measurement means that has a temperature measurement point at the center of a lateral cross-section of the flow path, and a soaking means provided farther upstream in the flow path than the temperature measurement point. The soaking means is provided with a grating provided continuously in a discretionary direction perpendicular to the direction in which the fluid flows, and an auxiliary flow path that is branched by the grating. This makes it possible to realize a temperature sensor with which it is possible to acquire a temperature measurement value representing the temperature of a fluid that is supplied to a mass flow rate meter from the outside, even when the temperature of the fluid fluctuates.
Inventors:
ITATANI MASAAKI (JP)
Application Number:
PCT/JP2021/032399
Publication Date:
March 24, 2022
Filing Date:
September 03, 2021
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
International Classes:
G01F1/684; G01K13/02
Domestic Patent References:
| WO2015141437A1 | 2015-09-24 |
Foreign References:
| JP2002243515A | 2002-08-28 | |||
| JP2011064278A | 2011-03-31 | |||
| JP2003065816A | 2003-03-05 | |||
| JPS55168181U | 1980-12-03 |
Attorney, Agent or Firm:
PROSPEC PATENT FIRM (JP)
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