Title:
TEST EQUIPMENT FOR IMAGE SENSOR
Document Type and Number:
WIPO Patent Application WO/2005/100944
Kind Code:
A1
Abstract:
Test equipment for image sensor in which optical characteristics of an image sensor (DUT) are tested by inputting/outputting electric signals from a contact part to the input/output terminals of the image sensor while irradiating the light receiving surface of the image sensor (DUT) with light. The image sensor (DUT) gripped by means of a contact arm (315) is imaged through a first camera (326); relative position of the image sensor (DUT) to the contact part is recognized through image processing; alignment amount of the image sensor (DUT) is calculated from the relative position while considering a previously calculated shift of the optical axis of the image sensor (DUT) from the optical axis of a light source; a driving section (322) is driven according to the alignment amount; and under a state where a lock and free mechanism (318) is not locked, a grip side arm (317) in abutment with a movable stage (321) is moved.
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Inventors:
KIYOKAWA TOSHIYUKI (JP)
Application Number:
PCT/JP2004/004665
Publication Date:
October 27, 2005
Filing Date:
March 31, 2004
Export Citation:
Assignee:
ADVANTEST CORP (JP)
KIYOKAWA TOSHIYUKI (JP)
KIYOKAWA TOSHIYUKI (JP)
International Classes:
G01M11/00; G01R31/26; H01L27/14; H01L27/146; (IPC1-7): G01M11/00; H01L27/14; G01R31/26
Foreign References:
| JPH03263345A | 1991-11-22 | |||
| JP2002164526A | 2002-06-07 | |||
| JPH07288270A | 1995-10-31 |
Attorney, Agent or Firm:
Maeda, Hitoshi (2F Tokyodo Jinboucho 3rd Bldg., 1-17,
Kandajinboucho 1-chom, Chiyoda-ku Tokyo, JP)
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