Title:
TEST PAD
Document Type and Number:
WIPO Patent Application WO/2020/177192
Kind Code:
A1
Abstract:
A test pad (2), comprising: a planarization layer (22); a source/drain layer (21) partially overlapping the planarization layer (22) and located below the planarization layer (22), wherein a boundary of the planarization layer (22) is adjoined to the upper surface of the source/drain layer (21); and a transparent conductive layer (23) extending from the upper surface of the source/drain layer (21) to the upper surface of the planarization layer (22) along a side wall of the planarization layer (22).
Inventors:
TAN GANG (CN)
HE CHAO (CN)
HE CHAO (CN)
Application Number:
PCT/CN2019/083602
Publication Date:
September 10, 2020
Filing Date:
April 22, 2019
Export Citation:
Assignee:
WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTD (CN)
International Classes:
H01L23/544
Foreign References:
| CN104062786A | 2014-09-24 | |||
| CN101576693A | 2009-11-11 | |||
| KR20160035200A | 2016-03-31 | |||
| CN101728399A | 2010-06-09 | |||
| CN109801925A | 2019-05-24 | |||
| CN106598321A | 2017-04-26 |
Attorney, Agent or Firm:
ESSEN PATENT & TRADEMARK AGENCY (CN)
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