Title:
TEST SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/049336
Kind Code:
A1
Abstract:
The present invention provides a test system that is adaptable to a plurality of specifications without a change in footprint. The test system comprises: a plurality of inspection cells, each of which is provided with a test head for use in inspection of a substrate on a stage; and a heat transfer medium supply unit which supplies a heat transfer medium to the stages. The heat transfer medium supply unit is disposed in an area below an inspection area where the plurality of inspection cells are disposed.
Inventors:
KONISHI KENTARO (JP)
Application Number:
PCT/JP2020/032766
Publication Date:
March 18, 2021
Filing Date:
August 28, 2020
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/66
Domestic Patent References:
| WO2018235411A1 | 2018-12-27 |
Foreign References:
| JP2019149500A | 2019-09-05 | |||
| JP2018534565A | 2018-11-22 | |||
| JP2010127600A | 2010-06-10 | |||
| JP2019029627A | 2019-02-21 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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