Title:
TESTING APPARATUS, TESTING SYSTEM, TESTING METHOD, AND TESTING PROGRAM
Document Type and Number:
WIPO Patent Application WO/2024/075381
Kind Code:
A1
Abstract:
Provided is a testing apparatus that comprises: an image data acquisition unit that acquires items of image data outputted by an image sensor as a device to be tested, in accordance with light having one or a plurality of emission patterns corresponding to a plurality of test items; an image processing control unit that transmits the one or plurality of items of image data acquired by the image data acquisition unit to two or more image processing devices, and causes image processing corresponding to separate test items in the plurality of test items to be executed in parallel by each of the two or more image processing devices; a test result acquisition unit that acquires test results of the test items corresponding to the image processing, which are derived from results of the image processing; and a determination unit that determines the quality of the device to be tested on the basis of the test results for each test item acquired by the test result acquisition unit.
Inventors:
SUGAWARA TOSHIHIRO (JP)
ADACHI TOSHIAKI (JP)
ADACHI TOSHIAKI (JP)
Application Number:
PCT/JP2023/028383
Publication Date:
April 11, 2024
Filing Date:
August 03, 2023
Export Citation:
Assignee:
ADVANTEST CORP (JP)
International Classes:
G01R31/26; H01L21/66
Attorney, Agent or Firm:
RYUKA & PARTNERS (JP)
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