Title:
TESTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/161644
Kind Code:
A1
Abstract:
A testing device 100 tests a wafer 10 to be tested which has formed thereon a device 12 to be tested including a magneto-resistive memory or a magnetic sensor. In a testing step, the wafer 10 to be tested is mounted on a stage 130. In the testing step, a magnetic field applying device 140 applies a magnetic field BEX to the wafer 10 to be tested. A testing probe card 160 is used in the testing step. A diagnosing wafer 170 has a plurality of magnetic detection units 172 formed thereon. In a diagnosing step of the testing device 100, the diagnosing wafer 170 is mounted on the stage 130 in place of the wafer 10 to be tested. A magnetic field BEX generated by the magnetic field applying device 140 can be measured by each of the magnetic detection units 172. A diagnosing probe card 180 is used in place of the testing probe card 160 in the diagnosing step.
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Inventors:
WATANABE NAOYOSHI (JP)
SATO SHIGEYUKI (JP)
UTSUMI RYOICHI (JP)
SATO SHIGEYUKI (JP)
UTSUMI RYOICHI (JP)
Application Number:
PCT/JP2020/046821
Publication Date:
August 19, 2021
Filing Date:
December 15, 2020
Export Citation:
Assignee:
ADVANTEST CORP (JP)
TOEI SCIENT INDUSTRIAL CO LTD (JP)
TOEI SCIENT INDUSTRIAL CO LTD (JP)
International Classes:
H01L43/12; G01R33/06; H01L21/66
Foreign References:
| JP2007024518A | 2007-02-01 | |||
| JP2004151056A | 2004-05-27 | |||
| JP2012198102A | 2012-10-18 | |||
| JP2007147568A | 2007-06-14 | |||
| JP2007243068A | 2007-09-20 | |||
| JPH04334077A | 1992-11-20 |
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
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