Title:
TFT ARRAY SUBSTRATE OF FLEXIBLE LIQUID CRYSTAL PANEL AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/037946
Kind Code:
A1
Abstract:
A preparation method for a TFT array substrate of a flexible liquid crystal panel, comprising: preparing an amorphous silicon layer (20) on the surface of a substrate (10) (100); preparing a TFT array (30) on the surface of the amorphous silicon layer (20) (200); cleaning the surface of the TFT array (30) (300); preparing a polydimethylsiloxane substrate (40) on the TFT array (30) (400); using lasers to irradiate, so that the amorphous silicon layer (20) is separated (500); providing a flexible substrate (60), and adhering the TFT array (30) to the flexible substrate (60) (600); and peeling off the polydimethylsiloxane substrate (40) (700).
Inventors:
SHI YU (CN)
CHEN XINGWU (CN)
CHEN XINGWU (CN)
Application Number:
PCT/CN2019/072125
Publication Date:
February 27, 2020
Filing Date:
January 17, 2019
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
G02F1/1362; G02F1/1337; H01L27/12
Foreign References:
| CN108828863A | 2018-11-16 | |||
| CN104377118A | 2015-02-25 | |||
| CN107844007A | 2018-03-27 | |||
| CN103257472A | 2013-08-21 | |||
| CN103985665A | 2014-08-13 | |||
| JP2009080301A | 2009-04-16 |
Attorney, Agent or Firm:
ESSEN PATENT&TRADEMARK AGENCY (CN)
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