Title:
TFT SUBSTRATE, SCANNING ANTENNA PROVIDED WITH TFT SUBSTRATE, AND METHOD FOR PRODUCING TFT SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2018/088278
Kind Code:
A1
Abstract:
According to the present invention, a source terminal part (ST) of a TFT substrate (105) comprises: a lower connection part (3sA) for source terminal, which is contained in a gate metal layer (3); and an upper connection part (19sA) for source terminal, which is contained in a conductive layer (19). A source gate connection part (SG) comprises: a source lower connection wiring line (3sg) which is contained in the gate metal layer and is connected to the lower connection part for source terminal; a source bus connection part (7sg) which is contained in a source metal layer (7) and is connected to a source bus line (SL); and a source upper connection part (19sg) which is contained in the conductive layer. The source upper connection part is in contact with the source lower connection wiring line within a third opening part (4sg1) that is formed in a gate insulating layer (4), while being in contact with the source bus connection part within a fifth opening part (11sg2) that is formed in an interlayer insulating layer (11).
Inventors:
MISAKI KATSUNORI
Application Number:
PCT/JP2017/039365
Publication Date:
May 17, 2018
Filing Date:
October 31, 2017
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L21/336; H01L29/786; H01Q3/34; H01Q3/44; H01Q13/22
Foreign References:
| JP2000022428A | 2000-01-21 | |||
| JP2009538565A | 2009-11-05 | |||
| JP2014531843A | 2014-11-27 | |||
| JPH04234202A | 1992-08-21 | |||
| JP2000196334A | 2000-07-14 |
Attorney, Agent or Firm:
OKUDA Seiji (JP)
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