Title:
THERMAL SPRAYING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/004190
Kind Code:
A1
Abstract:
This thermal spraying device comprises a cathode, an anode, and an inner tubing. The cathode is approximately cylindrical and has a flow path which is formed along the center axis and through which a spraying material passes. The anode, disposed opposite the downstream end of the cathode, generates arc discharge plasma with the cathode. The inner tubing: is disposed such that the center axes of the cathode and the anode are substantially matching; and forms at least two flow paths within the cathode. The at least two flow paths formed by the inner tubing include, inside the inner tubing, a first flow path for passing a spraying material along the cathode center axis. The at least two flow paths formed by the inner tubing include, outside the inner tubing, a second flow path which is formed on the radial outer-side of the first flow path, at least a portion of which is surrounded by the cathode, and which
is for passing an insulative gas.
More Like This:
Inventors:
KADOSAWA KATSUJI (JP)
SUGIHARA KAZUYOSHI (JP)
SUGIHARA KAZUYOSHI (JP)
Application Number:
PCT/JP2019/024348
Publication Date:
January 02, 2020
Filing Date:
June 19, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
C23C4/134; C23C4/123; H05H1/34
Domestic Patent References:
| WO2008026479A1 | 2008-03-06 | |||
| WO1997036692A1 | 1997-10-09 |
Foreign References:
| JP2001003151A | 2001-01-09 |
Other References:
"The Handbook of thermal spray technology", THE THERMAL SPRAYING SOCIETY OF JAPAN, 30 May 1998 (1998-05-30), pages 134 - 135 , 146-147
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
Download PDF: