Title:
THERMOELECTRIC CONVERSION ELEMENT, THERMOELECTRIC CONVERSION ELEMENT ARRAY, INFRARED SENSOR, AND METHOD FOR MANUFACTURING THERMOELECTRIC CONVERSION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2022/153765
Kind Code:
A1
Abstract:
Provided is a thermoelectric conversion element capable of achieving both high sensitivity and high-speed responsiveness. A thermoelectric conversion element 10 comprises: a substrate 11; a high-temperature-side first electrode 12 disposed on a surface of the substrate 11; a low-temperature-side second electrode 13 disposed on the surface of the substrate 11; a thermal conductor 14 linking the first electrode 12 and the second electrode 13, and containing a nanostructure; and an absorption film 15 that is formed on a surface of the first electrode 12 and absorbs incident light. The thermal conductor 14 is provided at a position separated from the substrate 11. In the thermoelectric conversion element 10, the absorption film 15 may be an infrared absorption film and the wavelength of the incident light may be in the range of 4 to 12 μm.
Inventors:
OOISHI RYOTA (JP)
KADONO KOJI (JP)
IMAIZUMI SHINJI (JP)
KADONO KOJI (JP)
IMAIZUMI SHINJI (JP)
Application Number:
PCT/JP2021/046172
Publication Date:
July 21, 2022
Filing Date:
December 15, 2021
Export Citation:
Assignee:
SONY GROUP CORP (JP)
International Classes:
H01L35/30; G01J1/02; H01L35/00; H01L35/22; H01L35/32; H01L35/34
Domestic Patent References:
| WO2017188438A1 | 2017-11-02 |
Foreign References:
| JP2009186223A | 2009-08-20 | |||
| JP2013050365A | 2013-03-14 | |||
| JP2009182173A | 2009-08-13 |
Attorney, Agent or Firm:
WATANABE Kaoru (JP)
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