THICKNESS MEASURING DEVICE - HAMAMATSU PHOTONICS KK

Title:

THICKNESS MEASURING DEVICE

Document Type and Number:

WIPO Patent Application WO/2003/091659

Kind Code:

A1

Abstract:

A Michelson interferometer (1) in a thickness measuring device (100) comprises two optical cables (4, 5) connected by an optical coupler (3), and each optical cable (4, 5) comprises polarization-preserving optical fibers (41) or the like connected by an optical connector (42) or the like. The optical connector (42) or the like adjusts its angular position by rolling the connected optical fiber (41) or the like around the optical axis.

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Inventors:

TAKAHASHI TERUO (JP)
SHIMIZU TOHRU (JP)

Application Number:

PCT/JP2003/005113

Publication Date:

November 06, 2003

Filing Date:

April 22, 2003

Export Citation:

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Assignee:

HAMAMATSU PHOTONICS KK (JP)
TAKAHASHI TERUO (JP)
SHIMIZU TOHRU (JP)

International Classes:

G01B9/02; G01B11/06; (IPC1-7): G01B11/06; G01B9/02

Domestic Patent References:

WO2001059830A1	2001-08-16
WO2001084620A1	2001-11-08
WO2001016556A1	2001-03-08

Foreign References:

JPH10221014A	1998-08-21
JP2001264246A	2001-09-26
JPH0829641A	1996-02-02
JP2001004538A	2001-01-12
JPH10325795A	1998-12-08
EP1900776A1	2008-03-19
JPH10221014A	1998-08-21
JP2001264246A	2001-09-26
US5206924A	1993-04-27

Other References: