Title:
THICKNESS MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/222454
Kind Code:
A1
Abstract:
A thickness measuring device of the present invention comprises: a supporter for supporting a specimen; an emission unit for emitting an electromagnetic wave toward the specimen; a chamber for encompassing the specimen; a receiving unit for receiving the electromagnetic wave outputted in the direction in which the chamber is positioned; and a control unit for calculating the thickness of the specimen by receiving a signal from the receiving unit. At least one area of the chamber transmits a part of the electromagnetic wave and reflects the remaining part thereof. The receiving unit receives a first electromagnetic wave having a first peak and receives a second electromagnetic wave having a second peak, the first peak indicates a first point of time and the second peak indicates a second point of time, and the first point of time and the second point of time have a difference that is greater than or equal to a first period.
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Inventors:
KIM HAK SUNG (KR)
OH GYUNG HWAN (KR)
PARK DONG WOON (KR)
KIM HEON SU (KR)
OH GYUNG HWAN (KR)
PARK DONG WOON (KR)
KIM HEON SU (KR)
Application Number:
PCT/KR2020/005265
Publication Date:
November 05, 2020
Filing Date:
April 21, 2020
Export Citation:
Assignee:
UNIV HANYANG IND UNIV COOP FOUND (KR)
International Classes:
G01B15/02; G01D1/12; G05D27/02
Foreign References:
| KR20180111424A | 2018-10-11 | |||
| JP2013205253A | 2013-10-07 | |||
| JP2009204627A | 2009-09-10 | |||
| KR20180040636A | 2018-04-20 | |||
| KR20170108281A | 2017-09-27 |
Attorney, Agent or Firm:
IPS PATENT FIRM (KR)
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