Title:
THIN FILM, BIOSENSOR, AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2022/154129
Kind Code:
A1
Abstract:
The present disclosure provides a novel method for manufacturing a thin film, with which it is possible to control the density of a thin film obtained. The method of the present disclosure relates to a method for manufacturing a thin film, comprising the following steps (a) to (e) in this order: (a) providing an electrically conductive substrate; (b) forming, using a first precursor, a first layer on a surface of the electrically conductive substrate; (c) removing at least some of an un-reacted material from the first layer; (d) forming a second layer by causing a second precursor to electrochemically bind to the surface of the electrically conductive substrate or the first layer; and (e) repeating steps (c) and (d).
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Inventors:
SAKATA TOSHIYA (JP)
SHIRATORI REIKO (JP)
NISHITANI SHOICHI (JP)
SHIRATORI REIKO (JP)
NISHITANI SHOICHI (JP)
Application Number:
PCT/JP2022/001655
Publication Date:
July 21, 2022
Filing Date:
January 18, 2022
Export Citation:
Assignee:
UNIV TOKYO (JP)
International Classes:
H01L29/786; G01N27/414
Foreign References:
| JP2019045417A | 2019-03-22 | |||
| JP2015034730A | 2015-02-19 | |||
| JP2014215292A | 2014-11-17 | |||
| JP2019045417A | 2019-03-22 |
Other References:
HIMORI SHOGO, NISHITANI SHOICHI, SAKATA TOSHIYA: "Control of Potential Response to Small Biomolecules with Electrochemically Grafted Aryl-Based Monolayer in Field-Effect Transistor-Based Sensors", LANGMUIR, vol. 35, no. 10, 12 March 2019 (2019-03-12), pages 3701 - 3709, XP055950507, ISSN: 0743-7463, DOI: 10.1021/acs.langmuir.9b00085
CHAOMIN CAO, YIN ZHANG, CHENG JIANG, MENG QI, GUOZHEN LIU: "Advances on Aryldiazonium Salt Chemistry Based Interfacial Fabrication for Sensing Applications", APPLIED MATERIALS & INTERFACES, vol. 9, no. 6, 15 February 2017 (2017-02-15), pages 5031 - 5049, XP055760587, ISSN: 1944-8244, DOI: 10.1021/acsami.6b16108
NISHITANI SHOICHI, FUKUMA TORU, HIMORI SHOGO, MAN YOUYUAN, SHIRATORI REIKO, SAKATA TOSHIYA: "Densification of Diazonium-Based Organic Thin Film as Bioelectrical Interface", LANGMUIR, vol. 37, no. 49, 14 December 2021 (2021-12-14), pages 14369 - 14379, XP055950520, ISSN: 0743-7463, DOI: 10.1021/acs.langmuir.1c02291
NISHITANI, S ET AL., ACS APPLIED MATERIALS & INTERFACES, vol. 11, 2019, pages 5561 - 5569
HIMORI, S ET AL., LANGMUIR, vol. 35, 2019, pages 3701 - 3709
PARVIZ, M ET AL., ELECTROANALYSIS, vol. 26, 2014, pages 1471 - 1480
THIAGARAJAN, S ET AL., BIOSENSORS AND BIOELECTRONICS, vol. 24, no. 8, 2009, pages 2712 - 2715
GARROTE, B ET AL., NATURE PROTOCOLS, vol. 15, 2020, pages 3879 - 3893
CHAOMIN CAO, YIN ZHANG, CHENG JIANG, MENG QI, GUOZHEN LIU: "Advances on Aryldiazonium Salt Chemistry Based Interfacial Fabrication for Sensing Applications", APPLIED MATERIALS & INTERFACES, vol. 9, no. 6, 15 February 2017 (2017-02-15), pages 5031 - 5049, XP055760587, ISSN: 1944-8244, DOI: 10.1021/acsami.6b16108
NISHITANI SHOICHI, FUKUMA TORU, HIMORI SHOGO, MAN YOUYUAN, SHIRATORI REIKO, SAKATA TOSHIYA: "Densification of Diazonium-Based Organic Thin Film as Bioelectrical Interface", LANGMUIR, vol. 37, no. 49, 14 December 2021 (2021-12-14), pages 14369 - 14379, XP055950520, ISSN: 0743-7463, DOI: 10.1021/acs.langmuir.1c02291
NISHITANI, S ET AL., ACS APPLIED MATERIALS & INTERFACES, vol. 11, 2019, pages 5561 - 5569
HIMORI, S ET AL., LANGMUIR, vol. 35, 2019, pages 3701 - 3709
PARVIZ, M ET AL., ELECTROANALYSIS, vol. 26, 2014, pages 1471 - 1480
THIAGARAJAN, S ET AL., BIOSENSORS AND BIOELECTRONICS, vol. 24, no. 8, 2009, pages 2712 - 2715
GARROTE, B ET AL., NATURE PROTOCOLS, vol. 15, 2020, pages 3879 - 3893
Attorney, Agent or Firm:
KONOUE, Masaharu et al. (JP)
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