THIN FILM COATER, COATING METHOD, AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY ELEMENT

Title:

THIN FILM COATER, COATING METHOD, AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY ELEMENT

Document Type and Number:

WIPO Patent Application WO/1999/010107

Kind Code:

A1

Abstract:

A method for manufacturing a liquid crystal element having least pixel defect in a high yield comprising the step of providing an electrode and a semiconductor element on a pair of transparent substrates, followed by the steps of applying photoresist, exposing, etching, stripping the resist, inspecting the electrode and the semiconductor element, applying an insulation film, applying an alignment layer, rubbing the alignment layer, spraying a spacer, applying a sealant, assembling a cell, encapsulating a liquid crystal, pasting a polarizer, and connecting an IC, characterized in that the substrate is irradiated with soft X-rays in at least one step preceeding the step of rubbing the alignment layer.

Inventors:

TANIOKA SATOSHI (JP)
MURATA SHIZUO (JP)
KONO MAKOTO (JP)
HIRANO MASAYUKI (JP)

Application Number:

PCT/JP1998/003713

Publication Date:

March 04, 1999

Filing Date:

August 21, 1998

Export Citation:

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Assignee:

CHISSO CORP (JP)
IINUMA GAUGE MANUFACTURING COM (JP)
HAMAMATSU PHOTONICS KK (JP)
TANIOKA SATOSHI (JP)
MURATA SHIZUO (JP)
KONO MAKOTO (JP)
HIRANO MASAYUKI (JP)

International Classes:

G21K5/10; B05C9/14; C09K19/06; G02F1/13; G02F1/1333; G02F1/1337; G09F9/00; (IPC1-7): B05C9/08; C09D5/00; G02F1/13; G02F1/1337

Foreign References:

JPH0845884A	1996-02-16
JPH0850293A	1996-02-20
JPH08211622A	1996-08-20
JPH07294928A	1995-11-10
JPH022515A	1990-01-08
JPH022525A	1990-01-08
JPH08211622A	1996-08-20
JPH0845695A	1996-02-16
JPH08124695A	1996-05-17
JPH0850293A	1996-02-20

Other References: