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Title:
THIN FILM MAGNETIC DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2011/148944
Kind Code:
A1
Abstract:
Disclosed is a thin film magnetic device which comprises a magnetic layer, an alcohol etchable layer, and a factor barrier layer. The magnetic layer is provided on top of a substrate. The alcohol etchable layer is provided on the magnetic layer and can be etched by alcohol plasma. The factor barrier layer is provided on the alcohol etchable layer and inhibits diffusion of factors, which deteriorate the magnetic layer, into the magnetic layer.

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Inventors:
KINOSHITA KEIZO (JP)
SUEMITSU KATSUMI (JP)
Application Number:
PCT/JP2011/061880
Publication Date:
December 01, 2011
Filing Date:
May 24, 2011
Export Citation:
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Assignee:
NEC CORP (JP)
KINOSHITA KEIZO (JP)
SUEMITSU KATSUMI (JP)
International Classes:
H01L21/8246; H01F10/32; H01L27/10; H01L27/105; H01L43/08; H01L43/12; H01L45/00
Foreign References:
JP2007049118A2007-02-22
JP2008135432A2008-06-12
JP2009071321A2009-04-02
JP2006190780A2006-07-20
Attorney, Agent or Firm:
KUDOH Minoru (JP)
Minoru Kudo (JP)
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