Title:
THIN FILM MAGNETIC RESISTOR ELEMENT AND METHOD FOR MANUFACTURING IT, AND MAGNETIC SENSOR USING THIN FILM MAGNETIC RESISTOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2006/057379
Kind Code:
A1
Abstract:
[PROBLEMS] To provide a thin film magnetic resistor element having high magnetic field sensitivity and excellent linearity, to provide a method for manufacturing the thin film magnetic resistor element at low cost and easily, and to provide a practical magnetic sensor using the thin film magnetic resistor element. [MEANS FOR SOLVING PROBLEMS] The thin film magnetic resistor element (1A) is composed of an insulating board (2); strip-shaped first soft magnetic film (3) and second soft magnetic film (4), which are formed on the insulating board (2) with their one edge arranged to face each other through a prescribed gap (g); nonmagnetic insulating films (5) formed on a portion close to the gap (g) on an upper lane of the first soft magnetic film (3), and on a portion close to the gap (g) on an upper plane of the second soft magnetic film (4), respectively; and a huge magnetic resistor thin film (6) formed on the insulating board (2) in the gap (g), on the edge planes of the first and second soft magnetic films (3, 4) facing the gap (g), and on the edge plane of the nonmagnetic insulating films (5) continued from the soft magnetic film edge planes and on a part of an upper lane of the nonmagnetic insulating film.
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Inventors:
TAKAHASHI YUKO (JP)
FUKUI HIROFUMI (JP)
HATANAI TAKAFUMI (JP)
ITO TAKUO (JP)
KOBAYASHI NOBUKIYO (JP)
SHIRAKAWA KIWAMU (JP)
MURAKAMI SUSUMU (JP)
FUKUI HIROFUMI (JP)
HATANAI TAKAFUMI (JP)
ITO TAKUO (JP)
KOBAYASHI NOBUKIYO (JP)
SHIRAKAWA KIWAMU (JP)
MURAKAMI SUSUMU (JP)
Application Number:
PCT/JP2005/021767
Publication Date:
June 01, 2006
Filing Date:
November 28, 2005
Export Citation:
Assignee:
ALPS ELECTRIC CO LTD (JP)
ATERIALS THE RES INST FOR ELEC (JP)
TAKAHASHI YUKO (JP)
FUKUI HIROFUMI (JP)
HATANAI TAKAFUMI (JP)
ITO TAKUO (JP)
KOBAYASHI NOBUKIYO (JP)
SHIRAKAWA KIWAMU (JP)
MURAKAMI SUSUMU (JP)
ATERIALS THE RES INST FOR ELEC (JP)
TAKAHASHI YUKO (JP)
FUKUI HIROFUMI (JP)
HATANAI TAKAFUMI (JP)
ITO TAKUO (JP)
KOBAYASHI NOBUKIYO (JP)
SHIRAKAWA KIWAMU (JP)
MURAKAMI SUSUMU (JP)
International Classes:
H01L43/08; G01R33/02; G01R33/09; G11B5/39; H01F10/32
Foreign References:
| JPH03263385A | 1991-11-22 | |||
| JP2001155314A | 2001-06-08 | |||
| JPH1187804A | 1999-03-30 | |||
| JP2002245607A | 2002-08-30 | |||
| JP2003198000A | 2003-07-11 | |||
| JP2002359412A | 2002-12-13 | |||
| JP2003179283A | 2003-06-27 | |||
| JP2003060258A | 2003-02-28 |
Attorney, Agent or Firm:
Nozaki, Teruo (Nishiwaki Building 1-4, Kojimachi 4-chom, Chiyoda-ku Tokyo 83, JP)
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