Title:
THIN FILM MATERIAL AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
WIPO Patent Application WO/2006/008893
Kind Code:
A1
Abstract:
A thin film material which can improve characteristics of a film formed on a board, and manufacturing method thereof are provided. A superconducting wire rod (1) is provided with a board (2), one or more intermediate thin film layers (intermediate layers (3)) formed on the board, and a single crystalline thin film layer (superconducting layer (4)) formed on the intermediate thin film layer (intermediate layer (3)). At least in one of the intermediate thin film layers (intermediate layers (3)), an upper surface (plane (10) to be polished) which faces the single crystalline thin film layer (superconducting layer (4)) is polished.
Inventors:
HAHAKURA SHUJI (JP)
OHMATSU KAZUYA (JP)
OHMATSU KAZUYA (JP)
Application Number:
PCT/JP2005/010831
Publication Date:
January 26, 2006
Filing Date:
June 14, 2005
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES (JP)
JURIDICAL FOUNDATION INTERNAT (JP)
HAHAKURA SHUJI (JP)
OHMATSU KAZUYA (JP)
JURIDICAL FOUNDATION INTERNAT (JP)
HAHAKURA SHUJI (JP)
OHMATSU KAZUYA (JP)
International Classes:
C23C14/08; C30B29/22; H01B12/06; H01B13/00; (IPC1-7): C30B29/22; C23C14/08; H01B12/06; H01B13/00
Foreign References:
| JPH06114812A | 1994-04-26 | |||
| JPH0652742A | 1994-02-25 | |||
| JPH0668728A | 1994-03-11 | |||
| JP2002150855A | 2002-05-24 |
Other References:
See also references of EP 1777324A4
Attorney, Agent or Firm:
Fukami, Hisao (Misui Sumitomo Bank Minamimorimachi Bldg.
1-29, Minamimorimachi 2-chome, Kita-k, Osaka-shi Osaka, JP)
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