Title:
THIN-FILM PHOTOELECTRIC CONVERSION DEVICE
Document Type and Number:
WIPO Patent Application WO/2008/059857
Kind Code:
A1
Abstract:
This invention provides a thin-film photoelectric conversion device having
a high level of conversion efficiency, comprising a transparent electroconductive
film, a photoelectric conversion unit, a transparent electrode layer, and a
high-reflectance electrode layer. The thin-film photoelectric conversion
device comprises a light transparent insulating substrate located on a light
incident side and the following elements stacked on the light transparent insulating
substrate in the following order from the light incident side: a transparent
electroconductive film, at least one photoelectric conversion unit, a transparent
electrode layer, and a high-reflectance electrode layer. The thin-film photoelectric
conversion device is characterized in that the transparent electrode layer
has a two-layer structure comprising a first electrode layer stacked on the photoelectric
conversion unit and having an in-layer hydrogen content of not less than 5 atomic%
and not more than 50 atomic%, and a second electrode layer stacked on the first
electrode layer and having an in-layer hydrogen content of not less than 0 atomic%
and less than 5 atomic%. The thin-film photoelectric conversion device is further
characterized in that the first electrode layer is formed of zinc oxide provided
by chemical vapor deposition.
Inventors:
FUKUDA SUSUMU (JP)
TAWADA YUKO (JP)
TAWADA YUKO (JP)
Application Number:
PCT/JP2007/072070
Publication Date:
May 22, 2008
Filing Date:
November 14, 2007
Export Citation:
Assignee:
KANEKA CORP (JP)
FUKUDA SUSUMU (JP)
TAWADA YUKO (JP)
FUKUDA SUSUMU (JP)
TAWADA YUKO (JP)
International Classes:
H01L31/04; C23C14/08; C23C16/40; H01L21/205; H01L31/0224
Foreign References:
| JP2000261011A | 2000-09-22 | |||
| JPS627123A | 1987-01-14 | |||
| JPH11284211A | 1999-10-15 | |||
| JPS628578A | 1987-01-16 | |||
| JP2000150934A | 2000-05-30 | |||
| JP2003264307A | 2003-09-19 | |||
| JP2005197608A | 2005-07-21 |
Attorney, Agent or Firm:
KANEKA CORPORATION (Kita-ku Osaka-sh, Osaka 88, JP)
Download PDF: