THIN FILM SEALING DEVICE

WIPO Patent Application WO/2013/122391

A1

The present invention relates to a thin film sealing device. The thin film sealing device according to the present invention is used to seal a thin film by injecting monomers supplied from the outside onto a substrate through a nozzle. The present invention includes: a housing having an accommodating space inside and provided with an opening portion so that the monomers are injected onto the substrate through the nozzle; a head portion receiving the monomers so as to accommodate the monomers therein, wherein the head portion is provided in a rotatable manner in the accommodating space in the housing, and the nozzle is formed on the outer circumferential surface so that the monomers are injected when the nozzle is placed at a position corresponding to the opening portion; a gate portion disposed away from the nozzle in an arcing direction on the outer circumferential surface of the head portion, wherein at least one inclined surface is formed on at least one surface in such a manner as to be capable of moving upward and downward so that the opening portion is closed when the gate portion is placed at a position corresponding to the opening portion; and at least one guide member interposed between the housing and the head portion away from one side of the opening portion, wherein the guide member guides the gate portion in the direction in which the opening portion is opened or closed by making contact with the inclined surface which is formed in the gate portion.

YOUN HYUN SIK (KR)

PCT/KR2013/001139

August 22, 2013

February 14, 2013

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SNU PRECISION CO LTD (KR)

H01L51/56; H05B33/04

KR20080029198A	2008-04-03
JP2005113240A	2005-04-28
KR20030024338A	2003-03-26
US6189806B1	2001-02-20

CHO, YOUNG HYUN (KR)
조영현 (KR)

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