Title:
THIN FILM SEMI-PERMEABLE MEMBRANES FOR GAS SENSOR AND CATALYTIC APPLICATIONS
Document Type and Number:
WIPO Patent Application WO2004066415
Kind Code:
A3
Abstract:
The invention relates to novel sensors of the catalytic gas-sensing thin-film metal surface type wherein the surface has an inorganic protective membrane coating formed by a pulsed dc sputtering technique. Preferably, the thin-film metal surface is a Pd, Pt, Ni, Au, Ag or an alloy thereof. The inorganic membrane is of the formula MaObNcCd where M is a metal or semiconductor, O is oxygen, N is nitrogen, and C is carbon and a, b, c, and d can each independently range from zero to seven with the proviso that at least two of a, b, c, and d are non-zero. The sensor design is particularly useful for various hydrogen sensing applications. The invention also includes their method of manufacture.
Inventors:
JAYARAMAN RAVIPRAKASH (US)
HORN MARK W (US)
PILIONE LAWRENCE J (US)
MESSIER RUSSELL F (US)
HORN MARK W (US)
PILIONE LAWRENCE J (US)
MESSIER RUSSELL F (US)
Application Number:
PCT/US2004/001838
Publication Date:
January 13, 2005
Filing Date:
January 23, 2004
Export Citation:
Assignee:
PENN STATE RES FOUND (US)
JAYARAMAN RAVIPRAKASH (US)
HORN MARK W (US)
PILIONE LAWRENCE J (US)
MESSIER RUSSELL F (US)
JAYARAMAN RAVIPRAKASH (US)
HORN MARK W (US)
PILIONE LAWRENCE J (US)
MESSIER RUSSELL F (US)
International Classes:
G01N21/00; G01N27/04; G01N27/22; G01N27/26; G01N33/00; G01N27/40; H01M; (IPC1-7): G01N21/00; G01N27/04; G01N27/22; G01N27/26
Foreign References:
| US20020017126A1 | 2002-02-14 | |||
| DE10105580A1 | 2002-08-22 | |||
| US4608549A | 1986-08-26 | |||
| JP2002372487A | 2002-12-26 | |||
| US5783152A | 1998-07-21 |
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