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Title:
THIN FILM SOLAR CELL AND METHOD FOR MANUFACTURING SAME, AND BASE WITH TRANSPARENT CONDUCTIVE FILM AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2011/136177
Kind Code:
A1
Abstract:
Disclosed is a thin film solar cell which comprises, on a substrate (1), a multilayer film (2), a first electrode layer (3) that is formed on the multilayer film (2) and composed of a light-transmitting conductive film that is mainly composed of zinc oxide, photoelectric conversion layers (4, 6) that perform photoelectric conversion, and a second electrode layer (8) in this order. The multilayer film (2) is obtained by laminating one or more pairs of a hafnium oxide layer (2a) and a silicon oxide layer (2b) laminated from the substrate (1) side. The pair right below the first electrode layer (3) is composed of a hafnium oxide layer (2a) having a film thickness of 20-40 nm and a silicon oxide layer (2b) having a film thickness of 2-10 nm. The first electrode layer (3) has a recessed and projected pattern on the photoelectric conversion layer (4)-side surface.

Inventors:
ORITA TAE (JP)
MOTOYA TSUKASA (JP)
MATSUURA TSUTOMU (JP)
YAMARIN HIROYA (JP)
Application Number:
PCT/JP2011/060064
Publication Date:
November 03, 2011
Filing Date:
April 25, 2011
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Assignee:
MITSUBISHI ELECTRIC CORP (JP)
ORITA TAE (JP)
MOTOYA TSUKASA (JP)
MATSUURA TSUTOMU (JP)
YAMARIN HIROYA (JP)
International Classes:
H01L31/042
Domestic Patent References:
WO2010026899A12010-03-11
Foreign References:
JP2004228449A2004-08-12
JP2003142705A2003-05-16
JP2000294812A2000-10-20
JP2001060708A2001-03-06
JP2005197140A2005-07-21
Attorney, Agent or Firm:
SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)
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