THIN-FILM-TRANSISTOR, THIN-FILM-TRANSISTOR ARRAY SUBSTRATE, FABRICATING METHODS THEREOF, AND DISPLAY PANEL

Title:

THIN-FILM-TRANSISTOR, THIN-FILM-TRANSISTOR ARRAY SUBSTRATE, FABRICATING METHODS THEREOF, AND DISPLAY PANEL

Document Type and Number:

WIPO Patent Application WO/2017/004939

Kind Code:

A1

Abstract:

A TFT, a related TFT array substrate, fabricating methods thereof, a display panel and a display device containing the same are provided. A method for fabricating a TFT is provided, the method comprising: forming an initial conductive layer on a base substrate (01); performing an oxidization process to partially oxidize the initial conductive layer to form an oxidized insulating sub-layer (15) and a non-oxidized conductive sub-layer(10); and forming an active layer(19), a source electrode (20) and a drain electrode (21) over the oxidized insulating sub-layer (15).

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Inventors:

YUAN GUANGCAI (CN)
YAN LIANGCHEN (CN)
XU XIAOGUANG (CN)
WANG LEI (CN)
PENG JUNBIAO (CN)
LAN LINFENG (CN)

Application Number:

PCT/CN2015/096953

Publication Date:

January 12, 2017

Filing Date:

December 10, 2015

Export Citation:

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Assignee:

BOE TECHNOLOGY GROUP CO LTD (CN)
UNIV SOUTH CHINA TECH (CN)

International Classes:

H01L21/34; H01L21/44; H01L21/77; H01L27/12; H01L29/423; H01L29/786

Foreign References:

CN1558447B	2010-04-28
CN104966674A	2015-10-07
CN102623510A	2012-08-01
JP2010192501A	2010-09-02
US20060110871A1	2006-05-25
US20120119216A1	2012-05-17
GB2134707A	1984-08-15
CN1558447A	2004-12-29

Other References: