Title:
THIN-FILM ULTRA-HIGH FREQUENCY DIAGNOSTIC DEVICE FOR PLASMA DIAGNOSIS AND PLASMA DIAGNOSTIC MODULE COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2024/025241
Kind Code:
A1
Abstract:
In a thin-film ultra-high frequency diagnostic device for plasma diagnosis and a plasma diagnostic module comprising same, the ultra-high frequency diagnostic device comprises at least one antenna located in a space where plasma is generated, wherein the antenna comprises: a base substrate; and an electrode unit formed on the base substrate along the center of the base substrate and exposed to the space where the plasma is generated to transmit and receive ultra-high frequency signals.
Inventors:
KIM DAE-WOONG (KR)
KANG WOO SEOK (KR)
HUR MIN (KR)
LEE JINYEONG (KR)
KIM HYEONG U (KR)
KIM MUYOUNG (KR)
KANG WOO SEOK (KR)
HUR MIN (KR)
LEE JINYEONG (KR)
KIM HYEONG U (KR)
KIM MUYOUNG (KR)
Application Number:
PCT/KR2023/010354
Publication Date:
February 01, 2024
Filing Date:
July 19, 2023
Export Citation:
Assignee:
KOREA INST MACH & MATERIALS (KR)
International Classes:
H01J37/32; H05H1/00
Foreign References:
| JP2008258375A | 2008-10-23 | |||
| KR20200095022A | 2020-08-10 | |||
| KR20200113493A | 2020-10-07 | |||
| KR20200021914A | 2020-03-02 | |||
| US20190074166A1 | 2019-03-07 |
Attorney, Agent or Firm:
KIM, Min-tae (KR)
Download PDF: