THIN FILMS OF OXIDIC MATERIALS HAVING A HIGH DIELECTRIC CONSTANT

Title:

THIN FILMS OF OXIDIC MATERIALS HAVING A HIGH DIELECTRIC CONSTANT

Document Type and Number:

WIPO Patent Application WO2004028999

Kind Code:

A3

Abstract:

The invention relates to a method for coating a substrate, according to which a fine-particle suspension of crystalline oxide particles is applied to a substrate, the suspension medium is evaporated, and the coating is sintered on the substrate.

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Inventors:

STERZEL HANS-JOSEF (DE)

Application Number:

PCT/EP2003/009945

Publication Date:

May 13, 2004

Filing Date:

September 08, 2003

Export Citation:

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Assignee:

BASF AG (DE)
STERZEL HANS-JOSEF (DE)

International Classes:

B05D1/12; B05D3/02; C01G23/00; C01G25/00; C01G35/00; C04B35/01; C04B35/468; C04B35/47; C04B35/475; C04B35/491; C04B35/645; C04B41/50; C23C18/12; C23C24/10; H01L21/316; (IPC1-7): C23C24/10; C04B35/468; C04B35/01; C04B41/50; C23C18/12

Foreign References:

DE19939686A1	2001-02-22
EP0881649A1	1998-12-02
US5683614A	1997-11-04
EP0518049A2	1992-12-16
DE3148362A1	1983-06-09

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