Title:
THOMSON SCATTERING MEASUREMENT SYSTEM AND EUV LIGHT GENERATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2018/134861
Kind Code:
A1
Abstract:
A Thomson scattering measurement system according to the present disclosure includes: a transfer optical system that is provided on the optical path of a group of slit light beams extracted through a slit array, and transfers the group of slit light beams to a plurality of transfer image groups separated from each other; and a second slit that is provided on the optical path of light from the plurality of transfer image groups, and selectively allows the passing of light from a plurality of transfer images, from among the transfer images included in the plurality of transfer image groups, corresponding to slit light beams at different positions in a second direction within the group of slit light beams, said plurality of transfer images being positioned on a straight line extending in a direction corresponding to a first direction.
Inventors:
KOUGE KOUICHIRO (JP)
YANAGIDA TATSUYA (JP)
YANAGIDA TATSUYA (JP)
Application Number:
PCT/JP2017/001309
Publication Date:
July 26, 2018
Filing Date:
January 17, 2017
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; G01N21/63; H05G1/02
Domestic Patent References:
| WO2016117118A1 | 2016-07-28 | |||
| WO2004048943A1 | 2004-06-10 |
Foreign References:
| JP2014528084A | 2014-10-23 | |||
| JP2016180733A | 2016-10-13 | |||
| JP2011174886A | 2011-09-08 |
Attorney, Agent or Firm:
TSUBASA PATENT PROFESSIONAL CORPORATION (JP)
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