Title:
THREE-DIMENSIONAL FREE CURVED SURFACE SHAPE MEASURING APPARATUS AND METHOD
Document Type and Number:
WIPO Patent Application WO/2020/105978
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a three-dimensional free curved surface shape measuring apparatus and method which, in measuring in a non-contact optical manner the three-dimensional shape of an object having a complex form such as a free curved lens, allow the surface of an object to be measured to always stay nearly perpendicular to an optical axis of a probe by introducing a technique of tilting and rotating a stage, thereby maximizing measurement signals in all areas and thus increasing the measurement efficiency and measurable areas of the three-dimensional free curved surface shape. Another purpose of the present invention is to provide a three-dimensional free curved surface shape measuring apparatus and method which allow a highly accurate discernment of the degree of consistency between a designed shape and a processed shape by effectively restoring a three-dimensional free curved surface shape by means of the apparatus as specified.
Inventors:
LEE KEUNWOO (KR)
LEE HYUNG-SEOK (KR)
LEE HYUNG-SEOK (KR)
Application Number:
PCT/KR2019/015725
Publication Date:
May 28, 2020
Filing Date:
November 18, 2019
Export Citation:
Assignee:
NANO SYSTEM CO LTD (KR)
International Classes:
G01B11/24; B23Q17/20; G01B11/00; G01D1/04; G01D1/10; G06F15/02
Foreign References:
| JP2014081279A | 2014-05-08 | |||
| KR101421502B1 | 2014-07-22 | |||
| JP2002257511A | 2002-09-11 | |||
| KR20140094650A | 2014-07-30 | |||
| KR20050122303A | 2005-12-29 |
Attorney, Agent or Firm:
PLUS INTERNATIONAL IP LAW FIRM (KR)
Download PDF: