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Title:
THREE-DIMENSIONAL MEMORY DEVICES AND METHODS FOR FORMING THE SAME
Document Type and Number:
WIPO Patent Application WO/2022/193053
Kind Code:
A1
Abstract:
A 3D memory device includes a staircase and a plurality of groups of support structures (204) through the staircase. The plurality of groups of support structures (204) are arranged in a first direction (X), and each of the groups of support structures (204) comprises three support structures (204-1, 204-2, 204-3), wherein projections of the three support structures (204-1, 204-2, 204-3) form a triangular shape in a plane parallel to the first direction (X).

Inventors:
XU ZONGKE (CN)
YUAN BIN (CN)
WANG XIANGNING (CN)
ZHANG QIANGWEI (CN)
Application Number:
PCT/CN2021/080731
Publication Date:
September 22, 2022
Filing Date:
March 15, 2021
Export Citation:
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Assignee:
YANGTZE MEMORY TECH CO LTD (CN)
International Classes:
H01L27/115
Foreign References:
CN112466885A2021-03-09
US20190244970A12019-08-08
CN112490247A2021-03-12
CN109496356A2019-03-19
US20200185412A12020-06-11
Attorney, Agent or Firm:
NTD UNIVATION INTELLECTUAL PROPERTY AGENCY LTD. (CN)
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