Title:
THREE-DIMENSIONAL MEMORY AND PREPARATION METHOD THEREFOR, STORAGE SYSTEM, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/174421
Kind Code:
A1
Abstract:
The present disclosure provides a three-dimensional memory and a preparation method therefor, a storage medium, and an electronic device. The three-dimensional memory comprises a stacked structure, a plurality of first stop portions arranged along a first direction, a protective layer, and a plurality of contact columns. The stacked structure comprises a step structure, and the step structure comprises a plurality of staircase structures arranged along the first direction and having different heights along a second direction. The plurality of first stop portions are located on a plurality of steps of at least one staircase structure. The protective layer covers the step structure and the first stop portions, and the protective layer is at least partially located between the first stop portions and steps adjacent to the first stop portions. The contact columns pass through the protective layer and the first stop portions, and are connected to gate layers in the steps corresponding to the first stop portions.
Inventors:
ZHANG ZHONG (CN)
WANG DI (CN)
ZHOU WENXI (CN)
ZHANG KUN (CN)
XIA ZHILIANG (CN)
HUO ZONGLIANG (CN)
WANG DI (CN)
ZHOU WENXI (CN)
ZHANG KUN (CN)
XIA ZHILIANG (CN)
HUO ZONGLIANG (CN)
Application Number:
PCT/CN2023/082250
Publication Date:
September 21, 2023
Filing Date:
March 17, 2023
Export Citation:
Assignee:
YANGTZE MEMORY TECH CO LTD (CN)
International Classes:
H10B51/50
Foreign References:
| CN112106193A | 2020-12-18 | |||
| CN112018129A | 2020-12-01 | |||
| CN111769115A | 2020-10-13 | |||
| CN114023756A | 2022-02-08 |
Attorney, Agent or Firm:
BEIJING ZBSD PATENT & TRADEMARK AGENT LTD. (CN)
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