Title:
THREE-DIMENSIONAL MULTICOMPONENT NANOSTRUCTURE HAVING CONTINUOUSLY PATTERNED STRUCTURE, AND PREPARATION METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2013/077489
Kind Code:
A1
Abstract:
The present invention relates to a three-dimensional multicomponent nanostructure having a continuously patterned structure, and a preparation method thereof, and more specifically, to a three-dimensional multicomponent nanostructure having a continuously patterned structure prepared by repeatedly carrying out a series of the following steps: forming a target material-polymer composite structure using an ion bombardment phenomenon through physical ion etching; and removing only a polymer of the formed target material-polymer composite structure, and a preparation method thereof.
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Inventors:
JUNG HEE-TAE
JEON HWAN-JIN
JEONG HYEON-SU
JEON HWAN-JIN
JEONG HYEON-SU
Application Number:
PCT/KR2011/009918
Publication Date:
May 30, 2013
Filing Date:
December 21, 2011
Export Citation:
Assignee:
KOREA ADVANCED INST SCI & TECH (KR)
JUNG HEE-TAE
JEON HWAN-JIN
JEONG HYEON-SU
JUNG HEE-TAE
JEON HWAN-JIN
JEONG HYEON-SU
International Classes:
B82B3/00; B82B1/00; B82Y40/00
Foreign References:
| KR20110098601A | 2011-09-01 | |||
| KR20080052200A | 2008-06-11 | |||
| JP2005202104A | 2005-07-28 |
Other References:
JEON, HWAN-JIN ET AL.: "New top-down approach for fabricating high-aspect-ratio complex nanostructures with 10 nm scale features.", NANO LETTERS., vol. 10, 2010, pages 3604 - 3610
Attorney, Agent or Firm:
PARK, Young-Zoon (1719-3 Seocho3-dong Seocho-gu, Seoul 137-885, KR)
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Claims: