Title:
λ-Ti3O5 FILM FORMING SUBSTRATE AND METHOD FOR PRODUCING λ-Ti3O5 FILM FORMING SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2023/033182
Kind Code:
A1
Abstract:
This λ-Ti3O5 film forming substrate comprises a support substrate and a λ-Ti3O5 film provided directly on the support substrate.
Inventors:
YOSHIMATSU KOHEI (JP)
Application Number:
PCT/JP2022/033363
Publication Date:
March 09, 2023
Filing Date:
September 06, 2022
Export Citation:
Assignee:
UNIV TOHOKU (JP)
International Classes:
C01G23/04; C23C14/08; C23C14/28
Foreign References:
| JP2011241137A | 2011-12-01 | |||
| CN110071122A | 2019-07-30 |
Other References:
HAKOE FUMIYOSHI; TOKORO HIROKO; OHKOSHI SHIN-ICHI: "Dielectric and optical constants of λ-Ti3O5film measured by spectroscopic ellipsometry", MATERIALS LETTERS, vol. 188, 22 September 2016 (2016-09-22), AMSTERDAM, NL , pages 8 - 12, XP029850736, ISSN: 0167-577X, DOI: 10.1016/j.matlet.2016.09.084
CHEN HAO; HIROSE YASUSHI; NAKAGAWA KOUSUKE; IMOTO KENATA; OHKOSHI SHIN-ICHI; HASEGAWA TETSUYA: "Non-metallic electrical transport properties of a metastableλ-Ti3O5thin film epitaxially stabilized on a pseudobrookite seed layer", APPLIED PHYSICS LETTERS, vol. 116, no. 20, 20 May 2020 (2020-05-20), 2 Huntington Quadrangle, Melville, NY 11747, XP012247165, ISSN: 0003-6951, DOI: 10.1063/5.0008888
YOSHIMATSU KOHEI, KUMIGASHIRA HIROSHI: "Direct Synthesis of Metastable λ-Phase Ti 3 O 5 Films on LaAlO 3 (110) Substrates at High Temperatures", CRYSTAL GROWTH & DESIGN, vol. 22, no. 1, 5 January 2022 (2022-01-05), US , pages 703 - 710, XP093041268, ISSN: 1528-7483, DOI: 10.1021/acs.cgd.1c01214
CHEN HAO; HIROSE YASUSHI; NAKAGAWA KOUSUKE; IMOTO KENATA; OHKOSHI SHIN-ICHI; HASEGAWA TETSUYA: "Non-metallic electrical transport properties of a metastableλ-Ti3O5thin film epitaxially stabilized on a pseudobrookite seed layer", APPLIED PHYSICS LETTERS, vol. 116, no. 20, 20 May 2020 (2020-05-20), 2 Huntington Quadrangle, Melville, NY 11747, XP012247165, ISSN: 0003-6951, DOI: 10.1063/5.0008888
YOSHIMATSU KOHEI, KUMIGASHIRA HIROSHI: "Direct Synthesis of Metastable λ-Phase Ti 3 O 5 Films on LaAlO 3 (110) Substrates at High Temperatures", CRYSTAL GROWTH & DESIGN, vol. 22, no. 1, 5 January 2022 (2022-01-05), US , pages 703 - 710, XP093041268, ISSN: 1528-7483, DOI: 10.1021/acs.cgd.1c01214
Attorney, Agent or Firm:
TAZAKI Akira et al. (JP)
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