Title:
TIN DIOXIDE FILM, AND PREPARATION METHOD THEREFOR AND USE THEREOF
Document Type and Number:
WIPO Patent Application WO/2024/060806
Kind Code:
A1
Abstract:
A preparation method for a tin dioxide film, the preparation method comprising the following step: depositing a tin dioxide film on a substrate by means of an atomic layer deposition technique, wherein the deposition process comprises a step of reacting a first oxygen source and a second oxygen source, which are alternately used as an oxygen source, with a tin metal organic source, the first oxygen source being selected from one or two of water and hydrogen peroxide, and the second oxygen source being selected from one or more of ozone, oxygen, nitric oxide, nitrogen dioxide, plasma-activated ozone, plasma-activated oxygen, plasma-activated nitric oxide, and plasma-activated nitrogen dioxide. By using a second oxygen source and a first oxygen source to alternately supply an oxygen source, the defects of a single oxygen source in the prior art are overcome, and defects in the crystal structure of prepared tin oxide are reduced by utilizing the relatively strong oxidability of the second oxygen source, so that a relatively perfect crystal structure is obtained, the quality of film formation is improved, and the filling factor and the electron transmission capability of a device are ultimately improved.
Inventors:
ZHANG FU (CN)
DING LEI (CN)
HE YONGCAI (CN)
HE BO (CN)
YANG YING (CN)
LIU TONG (CN)
ZHANG HUA (CN)
LI BOCHAO (CN)
GU XIAOBING (CN)
XU XIXIANG (CN)
DING LEI (CN)
HE YONGCAI (CN)
HE BO (CN)
YANG YING (CN)
LIU TONG (CN)
ZHANG HUA (CN)
LI BOCHAO (CN)
GU XIAOBING (CN)
XU XIXIANG (CN)
Application Number:
PCT/CN2023/107021
Publication Date:
March 28, 2024
Filing Date:
July 12, 2023
Export Citation:
Assignee:
LONGI GREEN ENERGY TECHNOLOGY CO LTD (CN)
International Classes:
C23C16/40; C23C16/455
Foreign References:
| CN115584483A | 2023-01-10 | |||
| CN115440890A | 2022-12-06 | |||
| CN114220925A | 2022-03-22 | |||
| CN103103494A | 2013-05-15 | |||
| KR20130037569A | 2013-04-16 | |||
| US20210363633A1 | 2021-11-25 | |||
| JPH05339732A | 1993-12-21 |
Attorney, Agent or Firm:
BEIJING RUN ZEHENG INTELLECTUAL PROPERTY LAW FIRM (CN)
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