Title:
TIO2-CONTAINING QUARTZ-GLASS SUBSTRATE FOR AN IMPRINT MOLD AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2012/008343
Kind Code:
A1
Abstract:
The disclosed TiO2-containing quartz-glass substrate for an imprint mold has a principal surface and a side surface. The arithmetic-mean roughness (Ra) of the side surface is 1 nm or less and the root mean square of the frequency roughness of the side surface between 10 µm and 1 mm (MSFR_rms) is 10 nm or less.
Inventors:
KOIKE AKIO (JP)
MIYASAKA JUNKO (JP)
NAKANISHI HIROSHI (JP)
MIYASAKA JUNKO (JP)
NAKANISHI HIROSHI (JP)
Application Number:
PCT/JP2011/065497
Publication Date:
January 19, 2012
Filing Date:
July 06, 2011
Export Citation:
Assignee:
ASAHI GLASS CO LTD (JP)
KOIKE AKIO (JP)
MIYASAKA JUNKO (JP)
NAKANISHI HIROSHI (JP)
KOIKE AKIO (JP)
MIYASAKA JUNKO (JP)
NAKANISHI HIROSHI (JP)
International Classes:
B29C33/38; B29C59/02; C03B20/00; C03C3/06; C03C3/076; C03C19/00
Domestic Patent References:
| WO2009034954A1 | 2009-03-19 | |||
| WO2011068100A1 | 2011-06-09 |
Foreign References:
| JP2008303100A | 2008-12-18 | |||
| JP2009013048A | 2009-01-22 | |||
| JP2004315351A | 2004-11-11 | |||
| JP2010502538A | 2010-01-28 | |||
| JP2008266046A | 2008-11-06 |
Attorney, Agent or Firm:
OGURI Shohei et al. (JP)
Shohei Oguri (JP)
Shohei Oguri (JP)
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Claims: