Title:
TRANSFER APPARATUS AND TRANSFER METHOD
Document Type and Number:
WIPO Patent Application WO/2022/041256
Kind Code:
A1
Abstract:
Disclosed are a transfer apparatus and a transfer method. The transfer apparatus comprises at least one transfer unit. The transfer unit comprises: a lead-out device (10), comprising an airflow inlet, a micro-element inlet and a micro-element lead-out port, wherein the airflow inlet, the micro-element inlet and the micro-element lead-out port are in communication with one another; a micro-element source device (20) for storing a solution and micro-elements (21), the micro-element source device comprising a micro-element outlet, wherein the micro-element outlet is in communication with the micro-element inlet; and an airflow output device (30) comprising an airflow outlet, wherein the airflow inlet is in communication with the airflow outlet, and the airflow output device is used for outputting airflow into the lead-out device. The transfer apparatus may comprise a plurality of transfer units, such that a plurality of micro-elements may be transferred at a time, thereby being used for mass transfer of micro-elements.
Inventors:
TANG BIAO (CN)
ZHAI FENG (CN)
HSIAO CHUN-LUNG (CN)
FENG ZHONGSHAN (CN)
ZHAI FENG (CN)
HSIAO CHUN-LUNG (CN)
FENG ZHONGSHAN (CN)
Application Number:
PCT/CN2020/112699
Publication Date:
March 03, 2022
Filing Date:
August 31, 2020
Export Citation:
Assignee:
CHONGQING KONKA PHOTOELECTRIC TECH RESEARCH INSTITUTE CO LTD (CN)
International Classes:
H01L21/683
Foreign References:
| CN111244011A | 2020-06-05 | |||
| CN106417225A | 2017-02-22 | |||
| CN110581098A | 2019-12-17 | |||
| CN1574256A | 2005-02-02 | |||
| CN109888067A | 2019-06-14 | |||
| CN101826479A | 2010-09-08 | |||
| US7398735B1 | 2008-07-15 |
Attorney, Agent or Firm:
KANGXIN PARTNERS, P.C. (CN)
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