Title:
TRANSFER DEVICE AND METHOD, AND COMPUTER PROGRAM
Document Type and Number:
WIPO Patent Application WO/2011/141995
Kind Code:
A1
Abstract:
Disclosed is a transfer device (1) for transferring a pattern formed on a mold (200) to a transfer reception body (300), wherein the transfer device is provided with a mold holding means (154a) for holding a mold, a transfer reception body holding means (120a, 120b) for holding the transfer reception body, a pressing means (104) for contacting and pressing the mold and the transfer reception body to each other, a releasing means (104, 140a, 140b) for releasing the closely-attached mold and transfer reception body, and a deformation means (153a) for deforming the mold either at the time of contact immediately before the mold and the transfer reception body are mutually pressed or at the time of releasing after the pressing. The deformation means does not deform the mold while the mold and the transfer reception body are mutually pressed, the mode is attached to the mold holding means for holding, and the mold held by the mold holding means is removed.
Inventors:
IMAI TETSUYA (JP)
KOJIMA YOSHIAKI (JP)
KASUYA TAKAYUKI (JP)
KOJIMA YOSHIAKI (JP)
KASUYA TAKAYUKI (JP)
Application Number:
PCT/JP2010/057952
Publication Date:
November 17, 2011
Filing Date:
May 11, 2010
Export Citation:
Assignee:
PIONEER CORP (JP)
IMAI TETSUYA (JP)
KOJIMA YOSHIAKI (JP)
KASUYA TAKAYUKI (JP)
IMAI TETSUYA (JP)
KOJIMA YOSHIAKI (JP)
KASUYA TAKAYUKI (JP)
International Classes:
B29C59/02; B29C33/30; B29C33/44; H01L21/027
Foreign References:
| JP2009141328A | 2009-06-25 | |||
| JP2008524854A | 2008-07-10 | |||
| JP2009123318A | 2009-06-04 |
Attorney, Agent or Firm:
EGAMI, Tatsuo et al. (JP)
Tatsuo Egami (JP)
Tatsuo Egami (JP)
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Claims: