Title:
TRANSFER OF OPTICAL ELEMENT PATTERNS ON A SAME SIDE OF A SUBSTRATE ALREADY HAVING FEATURE THEREON
Document Type and Number:
WIPO Patent Application WO2003036339
Kind Code:
A3
Abstract:
A passive optical element is transferred into a substrate already having features with a vertical dimension thereon. The features may be another passive optical element, an active optical element, a dichroic layer, a dielectric layer, alignment features, metal portions. A protective layer is provided over the feature during the transfer of the optical element. One or more of these processes may be performed on a wafer level.
More Like This:
| JPS60111125 | MONOCHROMETER |
| JP4162976 | Optical element using one-dimensional photonic crystal |
| JP2000131633 | SCANNING OPTICAL DEVICE |
Inventors:
SULESKI THOMAS J (US)
BOYE ROBERT (US)
DELANEY WILLIAM (US)
MILLER HARRIS (US)
MORRIS JAMES (US)
HAN HONGTAO (US)
MATHEWS JAY (US)
BOYE ROBERT (US)
DELANEY WILLIAM (US)
MILLER HARRIS (US)
MORRIS JAMES (US)
HAN HONGTAO (US)
MATHEWS JAY (US)
Application Number:
PCT/US2002/033279
Publication Date:
February 26, 2004
Filing Date:
October 17, 2002
Export Citation:
Assignee:
DIGITAL OPTICS CORP (US)
SULESKI THOMAS J (US)
BOYE ROBERT (US)
DELANEY WILLIAM (US)
MILLER HARRIS (US)
MORRIS JAMES (US)
HAN HONGTAO (US)
MATHEWS JAY (US)
SULESKI THOMAS J (US)
BOYE ROBERT (US)
DELANEY WILLIAM (US)
MILLER HARRIS (US)
MORRIS JAMES (US)
HAN HONGTAO (US)
MATHEWS JAY (US)
International Classes:
G02B5/18; G03F7/00; (IPC1-7): G02B5/18
Foreign References:
| US5835458A | 1998-11-10 | |||
| US5687155A | 1997-11-11 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 011, no. 293 (P - 619) 22 September 1987 (1987-09-22)
NUSSBAUM, P., HERZIG, H. P.: "Refractive and diffractive elements for micro-optical systems", PROCEEDINGS OF THE SPIE, vol. 3226, 1997, pages 32 - 43, XP009012824
FERSTL, M., STEINGRÜBER, R.: "COMMERCIAL FABRICATION OF MICRO-STRUCTURES AND MICRO-OPTICAL ELEMENTS FOR RESEARCH AND INDUSTRIAL APPLICATIONS", ANNUAL REPORT 1998, HEINRICH-HERTZ-INSTITUT FÜR NACHRICHTENTECHNIK, 1999, pages 109 - 112, XP002246042
STERN M B: "Pattern transfer for diffractive and refractive microoptics", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 34, no. 3-4, 1 December 1997 (1997-12-01), pages 299 - 319, XP004108295, ISSN: 0167-9317
MOTAMEDI M E ET AL: "MICRO-OPTO-ELECTRO-MECHANICAL DEVICES AND ON-CHIP OPTICAL PROCESSING", OPTICAL ENGINEERING, SOC. OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS. BELLINGHAM, US, vol. 36, no. 5, 1 May 1997 (1997-05-01), pages 1282 - 1297, XP000692358, ISSN: 0091-3286
WU M C ET AL: "Micromechanical photonic integrated circuits", IEICE TRANSACTIONS ON ELECTRONICS, JUNE 2000, INST. ELECTRON. INF. & COMMUN. ENG, JAPAN, vol. E83-C, no. 6, pages 903 - 911, XP002246043, ISSN: 0916-8524
NUSSBAUM, P., HERZIG, H. P.: "Refractive and diffractive elements for micro-optical systems", PROCEEDINGS OF THE SPIE, vol. 3226, 1997, pages 32 - 43, XP009012824
FERSTL, M., STEINGRÜBER, R.: "COMMERCIAL FABRICATION OF MICRO-STRUCTURES AND MICRO-OPTICAL ELEMENTS FOR RESEARCH AND INDUSTRIAL APPLICATIONS", ANNUAL REPORT 1998, HEINRICH-HERTZ-INSTITUT FÜR NACHRICHTENTECHNIK, 1999, pages 109 - 112, XP002246042
STERN M B: "Pattern transfer for diffractive and refractive microoptics", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 34, no. 3-4, 1 December 1997 (1997-12-01), pages 299 - 319, XP004108295, ISSN: 0167-9317
MOTAMEDI M E ET AL: "MICRO-OPTO-ELECTRO-MECHANICAL DEVICES AND ON-CHIP OPTICAL PROCESSING", OPTICAL ENGINEERING, SOC. OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS. BELLINGHAM, US, vol. 36, no. 5, 1 May 1997 (1997-05-01), pages 1282 - 1297, XP000692358, ISSN: 0091-3286
WU M C ET AL: "Micromechanical photonic integrated circuits", IEICE TRANSACTIONS ON ELECTRONICS, JUNE 2000, INST. ELECTRON. INF. & COMMUN. ENG, JAPAN, vol. E83-C, no. 6, pages 903 - 911, XP002246043, ISSN: 0916-8524
Download PDF: