Title:
TRANSMISSION ELECTRON MICROSCOPE HIGH-RESOLUTION IN-SITU FLUID FREEZING CHIP AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2022/032463
Kind Code:
A1
Abstract:
Disclosed in the present invention are a transmission electron microscope high-resolution in-situ fluid freezing chip and a preparation method therefor. A support layer, a freezing layer, an insulating layer, a hole and a central window are provided on a lower piece of the chip; the freezing layer is provided with three contact electrodes, six pairs of semiconductor thin films and a conductive metal thin film; a circle of conductive metal thin film is provided on the periphery of the central window, and the central window is located at the center of the conductive metal thin film; the three contact electrodes are arranged at an edge of the chip; the six pairs of semiconductor thin films each have one end rested on the conductive metal thin film, and the other end rested on an electrode; by taking the central window as a center and in a region of an outer edge greater than the conductive metal thin film, after silicon is etched away, the hole is left, and the support layer covers above the hole; the conductive metal thin film is arranged on the support layer on the hole, and the insulating layer covers above the region of the freezing layer except the contact electrodes; and multiple small holes are provided on the central window. The chip has the advantages of rapid freezing of micro-areas, high resolution and a low sample drift rate.
Inventors:
LIAO HONGGANG (CN)
DENG JUNXIAN (CN)
JIANG YOUHONG (CN)
DENG JUNXIAN (CN)
JIANG YOUHONG (CN)
Application Number:
PCT/CN2020/108322
Publication Date:
February 17, 2022
Filing Date:
August 11, 2020
Export Citation:
Assignee:
UNIV XIAMEN (CN)
International Classes:
G01N23/04; G01N23/20; H01J37/20; H01J37/26; H01L21/02; H01L21/027; H01L21/50
Domestic Patent References:
| WO2008010718A2 | 2008-01-24 |
Foreign References:
| CN111370280A | 2020-07-03 | |||
| CN110337706A | 2019-10-15 | |||
| CN206535564U | 2017-10-03 |
Attorney, Agent or Firm:
XIAMEN JINGCHENGXINCHUANG INTELLECTUAL PROPERTY AGENCY CO., LTD (CN)
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