TRANSMISSION ELECTRON MICROSCOPE AND INSPECTION METHOD USING TRANSMISSION ELECTRON MICROSCOPE

WIPO Patent Application WO/2020/217456

A1

Provided is a transmission electron microscope capable of obtaining a hollow-cone dark-field image and visually displaying irradiation conditions thereof. The transmission electron microscope is provided with an irradiation unit for irradiating a specimen with an electron beam, an objective lens for causing the electron beam transmitted through the specimen to form an image, beam deflectors for deflecting the electron beam, said beam deflectors being positioned higher than a position where the specimen is to be placed, an objective movable aperture for passing only a portion of the electron beam transmitted through the specimen, and a deflection coil control unit. The deflection coil control unit controls a deflection angle of the electron beam using the beam deflectors such that the specimen is irradiated with the electron beam at a predetermined angle with respect to an optical axis while the electron beam is moving in a precessional manner and such that only a diffracted wave and/or a scattered wave having a desired angle among diffracted waves and/or scattered waves generated when the electron beam is transmitted through the specimen passes through the objective movable aperture.

YAGUCHI TOSHIE (JP)
TAMURA KEIJI (JP)
MISE HIROMI (JP)
NODERA YASUYUKI (JP)
WAKUI AKIKO (JP)
IGARASHI KEISUKE (JP)

PCT/JP2019/017938

October 29, 2020

April 26, 2019

Click for automatic bibliography generation  

HITACHI HIGH TECH CORP (JP)

H01J37/26; G01N23/225; H01J37/22; H01J37/28

JPS60105150A	1985-06-10
JPS60150548A	1985-08-08

TSUTSUI & ASSOCIATES (JP)

View/Download PDF      PDF Help

Previous Patent: TERMINAL DEVICE, BASE STATION DEVICE, AND WIRELESS COMMUNICATION METHOD

Next Patent: COMMUNICATION SYSTEM AND BASE STATION